The vacuum furnace system consists mainly of vacuum system, heating system and relevant control equipment.
The vacuum system consists of mechanical pump, diffusion pump, main road valve, bypass valve and high vacuum damper. The mechanical pump is a crude vacuum device, which is powered by a three-phase ac motor, and the work and stop of the pump is realized through the contact of ac contactor. High vacuum oil diffusion pump for high vacuum device, with the former mechanical pump and diffusion pump oil level, and the function of electric furnace heating extraction of the high vacuum degree requirements, through absorption and disconnect ac contactor control the on and off of electric heating furnace, and then control the action of diffusion pump and stop.
Heating system is composed of heating power and heating element, heating power magnetic voltage regulator, using dc excitation power supply for contactless smooth stepless voltage regulation of load, the dc excitation power supply controlled by power governor, governor using temperature controller and power detected by thermocouple temperature current value and the difference between the set value, the PID arithmetic, the output of 4 ~ 20 ma dc signal, control magnetic voltage regulator of magnetic saturation voltage, and then according to the set temperature control curve of temperature controller to realize the heating current and temperature automatic control.
In the design of the distributed control system, make full use of the computer a powerful computing and data processing function, timely monitoring system working condition, especially the introduction of intelligent automatic setting of PID parameters, further enhance the control index of the vacuum furnace system.
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